article · 2003
Residual stress mapping with a scanning phase-measuring acoustic microscope
Steven W. Meeks, D. Peter, D. Horne, K. Young, V. Novotný
Cited by 8Abstract and details only
Abstract
A high-resolution scanning phase-measuring acoustic microscope (SPAM) has been developed, and using the acoustoelastic effect, has been used to image the near-surface residual stress field around features etched in sputtered alumina. This microscope operates at 670 MHz and has a resolution of 5-10 mu m, depending upon the amount of defocus. Relative-velocity changes of sample surface waves as small as 50 parts per million are resolved. Images of the stress field at the tip of a 400- mu m-wide slot etched in alumina are presented and compared with a finite element simulation. The SPAM uses an unconventional acoustic lens with an anisotropic illumination pattern which can measure anisotropic effects and map residual stress fields with several-micrometer resolution and a stress sensitivity of 1/3 MPa in an alumina film.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
Cite this paper
Meeks, S. W., Peter, D., Horne, D., Young, K., & Novotný, V. (2003). Residual stress mapping with a scanning phase-measuring acoustic microscope. https://doi.org/10.1109/ultsym.1989.67099
Meeks, Steven W., et al. “Residual stress mapping with a scanning phase-measuring acoustic microscope.” vol. xvii, 2003, pp. 809–12, https://doi.org/10.1109/ultsym.1989.67099.
Meeks, Steven W., D. Peter, D. Horne, K. Young, and V. Novotný. 2003. “Residual stress mapping with a scanning phase-measuring acoustic microscope.” https://doi.org/10.1109/ultsym.1989.67099.
Meeks, S.W. et al. (2003) ‘Residual stress mapping with a scanning phase-measuring acoustic microscope’. Available at: https://doi.org/10.1109/ultsym.1989.67099.
@article{meeks2003residual,
title = {{Residual stress mapping with a scanning phase-measuring acoustic microscope}},
author = {Meeks, Steven W. and Peter, D. and Horne, D. and Young, K. and Novotný, V.},
volume = {xvii},
pages = {809--812},
year = {2003},
doi = {10.1109/ultsym.1989.67099}
}Made from the index record. Check names, capitalisation and page numbers against the paper. Need another style? AI for Research has over 10,000.