Data Preprocessing of Semiconductor Manufacturing System

Li, L., Yu, Q., Lin, K.-Y., Ma, Y., & Qiao, F. (2023). Data Preprocessing of Semiconductor Manufacturing System. Advanced and intelligent manufacturing in China, 67–98. https://doi.org/10.1007/978-981-19-7588-2_3

Li, Li, et al. “Data Preprocessing of Semiconductor Manufacturing System.” Advanced and intelligent manufacturing in China, 2023, pp. 67–98, https://doi.org/10.1007/978-981-19-7588-2_3.

Li, Li, Qingyun Yu, Kuo-Yi Lin, Yumin Ma, and Fei Qiao. 2023. “Data Preprocessing of Semiconductor Manufacturing System.” Advanced and intelligent manufacturing in China: 67–98. https://doi.org/10.1007/978-981-19-7588-2_3.

Li, L. et al. (2023) ‘Data Preprocessing of Semiconductor Manufacturing System’, Advanced and intelligent manufacturing in China, pp. 67–98. Available at: https://doi.org/10.1007/978-981-19-7588-2_3.

@incollection{li2023data,
  title = {{Data Preprocessing of Semiconductor Manufacturing System}},
  author = {Li, Li and Yu, Qingyun and Lin, Kuo-Yi and Ma, Yumin and Qiao, Fei},
  booktitle = {Advanced and intelligent manufacturing in China},
  pages = {67--98},
  year = {2023},
  doi = {10.1007/978-981-19-7588-2_3}
}