other · Institutional Repository of Xi'an Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (Xian Institute of Optics and Precision Mechanics) · 2017
Laser-based separation method
BEYER, CHRISTIAN, RICHTER, JAN
Cited by 0Abstract and details only
Abstract
The invention relates to a method for creating a detachment area (2) in a solid (1), in particular for detaching the solid (1) along the separating region (2). Said solid portion (12) that is to be detached is thinner than the solid body (1) from which the solid portion (12) has been removed. According to the invention, said method preferably comprises at least the following steps: the crystal lattice of the solid (1) is modified by means of a modifying agent, in particular by means of at least one laser, in particular a pico- or femtosecond laser. The modifications, in particular the laser beams penetrate into the solid (1) via a surface (5) of the solid portion (12) which is to be detached, several modifications (9) are created in the crystal lattice, said crystal lattice penetrates, following said modifications (9), in the areas surrounding the modifications (9), at least in one particular part.
Cite this paper
BEYER, C., & RICHTER, J. (2017). Laser-based separation method. Institutional Repository of Xi'an Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (Xian Institute of Optics and Precision Mechanics).
BEYER, CHRISTIAN, and JAN RICHTER. “Laser-based separation method.” Institutional Repository of Xi'an Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (Xian Institute of Optics and Precision Mechanics), 2017.
BEYER, CHRISTIAN, and JAN RICHTER. 2017. “Laser-based separation method.” Institutional Repository of Xi'an Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (Xian Institute of Optics and Precision Mechanics).
BEYER, C. and RICHTER, J. (2017) ‘Laser-based separation method’, Institutional Repository of Xi'an Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (Xian Institute of Optics and Precision Mechanics).
@misc{beyer2017laser,
title = {{Laser-based separation method}},
author = {BEYER, CHRISTIAN and RICHTER, JAN},
journal = {Institutional Repository of Xi'an Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (Xian Institute of Optics and Precision Mechanics)},
year = {2017}
}Made from the index record. Check names, capitalisation and page numbers against the paper. Need another style? AI for Research has over 10,000.