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About 4,015 papers for “interference microscope”
D. Goldstein · AccessScience · 2015
AccessScience is an authoritative and dynamic online resource that contains incisively written, high-quality educational material covering all major scientific disciplines. An acclaimed gateway to scientific knowledge, AccessScience is continually expanding the ways it can demonstrate and explain core, trustworthy scientific information that inspires and guides users to deeper knowledge.
Cited by 0
Antti Meriläinen, Edward Hæggström · 2016
We present an acoustic interference microscope. This device employs a continuous Tx signal and the time-of-flight of the echoes are calculated from interference between incident and reflected waves by an inverse Fourier transform. Using a 175 MHz focused transducer we measured a B-scan across a 5 μm silicon step sample with both the acoustic interference and a conventional ultrasound microscope. The results obtained with both devices were similar.
Cited by 0
Romuald Aw, Lu Czyk, D et al. · Prace Naukowe Uniwersytetu Ekonomicznego we Wrocławiu · 1972
Holographic Interference MicroscopeAn experimental model of a holographic microinterferometer was developed and constructed.The optical system used in the present paper allows to continuousky change the intensity ratio of the object and reference beam in a very wide range, which greatly facilitates the recording of high quality holograms, as well as obtaining high contrast interference images.Depending on the type of the hologram employed, the device can be regarded as a normal two-beam interferometer, or the la terally or angularly shearing interferometer.In the case of changing objects, the interference in the real time, or the double exposure method employing studies can be performed.The microinterferometer can also be used for interferometric comparison of the object investigated with the reference object.Besides, the optical arrangement allows for employing the device as a normal microscope, or a polarizing microscope with laser light illumination.
Cited by 0Open access
G. Discombe · BMJ · 1959
Cited by 15
Е. В. Сысоев, Ignat A. Vykhristyuk, Р. В. Куликов et al. · Optoelectronics Instrumentation and Data Processing · 2010
The structure and functional capabilities of a digital optical microscope-profilometer capable of operating in two modes, those of micro- and nanomeasurements, are presented. The instrument operation principle is based on measuring the phase function of the wave front of light scattered by the measured surface. Software for the microscope-profilometer and its performance characteristics are considered.
Cited by 9
C.F.A. CULLING · Elsevier eBooks · 1974
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Eric Goodwin, James C. Wyant · SPIE eBooks · 2009
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Fang C. Chang, G. S. Kino · Applied Optics · 1998
We first discuss an interference microscope's 3D response in terms of Richards and Wolf's vector theory. We then report the results we obtained with a 325-nm interference microscope using an ultraviolet transparent beam splitter, short-working-distance Mirau interferometer. The microscope performs at near-ideal definitions with a measured FWHM of the intensity spot at 0.14 mum and a FWHM of the depth envelope intensity at 0.25 mum. Feasibility of a shorter wavelength system operating at 248 nm is demonstrated.
Cited by 19
D. K. Hamilton, Colin J. R. Sheppard · Optica Acta International Journal of Optics · 1982
An interference version of the confocal microscope, which has several advantages over a conventional interference microscope, is described, and comparative results from different modes of operation are presented.
Cited by 48
C. Baker Ltd. · Journal of Scientific Instruments · 1958
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Michael B. Sinclair · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 2023
Disclosed is a long working distance interference microscope suitable for three-dimensional imaging and metrology of MEMS devices and test structures on a standard microelectronics probe station. The long working distance of 10-30 mm allows standard probes or probe cards to be used. This enables nanometer-scale 3-D height profiles of MEMS test structures to be acquired across an entire wafer. A well-matched pair of reference/sample objectives is not required, significantly reducing the cost of this microscope, as compared to a Linnik microinterferometer.
Cited by 0Open access
Parameswaran Hariharan · Optical Engineering · 2007
The Mirau interference microscope features a very compact interferometer incorporated in a single microscope objective. We describe a simple modification that results in the exiting beams being orthogonally polarized. This modification makes it possible to introduce achromatic phase shifts in the two beams, facilitating the use of the Mirau interferometer for white-light phase-shifting interference microscopy.
Cited by 17
Bulletin of Miscellaneous Information (Royal Gardens Kew) · 1952
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Michael B. Sinclair · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 2023
A full-field imaging, long working distance, incoherent interference microscope suitable for three-dimensional imaging and metrology of MEMS devices and test structures on a standard microelectronics probe station. A long working distance greater than 10 mm allows standard probes or probe cards to be used. This enables nanometer-scale 3-dimensional height profiles of MEMS test structures to be acquired across an entire wafer while being actively probed, and, optionally, through a transparent window. An optically identical pair of sample and reference arm objectives is not required, which reduces the overall system cost, and also the cost and time required to change sample magnifications. Using a LED source, high magnification (e.g., 50.times.) can be obtained having excellent image quality, straight fringes, and high fringe contrast.
Cited by 0Open access
The Medical Journal of Australia · 1958
Cited by 58
Kim, Myung K. · Digital Commons - University of South Florida (University of South Florida) · 2006
A simple digital holographic apparatus and method allow reconstruction of three-dimensional objects with a very narrow depth of focus or high axial resolution. A number of holograms are optically generated using different wavelengths spaced at regular intervals. They are recorded, such as on a digital camera, and are reconstructed numerically. Multiwavelength interference of the holograms results in contour planes of very small thickness and wide separation. Objects at different distances from the hologram plane are imaged clearly and independently with complete suppression of the out-of-focus images. The technique is uniquely available only in digital holography and has applications in holographic microscopy.
Cited by 1Open access
J Mcfadyean, A Scheather, J Edwards et al. · Journal of the Franklin Institute · 1959
Cited by 48Open access
Деннис Габор, W. P. Goss · Journal of the Optical Society of America · 1966
An interference microscope is described, constructed in 1951–56, in which three-dimensional objects can be reconstructed, correctly incorporating amplitudes and phases, from two photographs simultaneously taken on one plate. These photographs are “holograms,” that is to say, records of the interference of the image-carrying wave, split in two, with a coherent background wave, also split in two. A phase difference of a quarter wave is produced, for the two otherwise identical photographs, between the image-carrying waves and their respective coherent backgrounds. The two photographs are in sine–cosine or “quadrature” relation; between them they contain the full optical information. If they are illuminated in such a way that there is a difference of a quarter wave in the phases at two corresponding points, and if the two beams are united, the original image-carrying wave is restored correctly in amplitude and in phase. An essential part of the instrument is a “quadrature prism”; a beam splitter with a three-layer sandwich, which establishes the quadrature relation in the taking of the holograms.The microscope has the advantage that it need not be focused, as it gives a three-dimensional reconstruction. Moreover, photographs can be taken with 1/10 or even 1/100 of the light required for exposure going through the object; the rest of the energy is supplied by the background beam, which is 10–100 times stronger, and which goes around the object.Many details of the instrument are now out of date owing to the invention of the laser. Alternative methods which have now become possible are discussed for realizing the principle of total reconstruction.
Cited by 120
Boris Cencič, M. Barut, Peter Langenbeck · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1989
An interference microscope enables visual inspection of optically smooth surfaces in order to obtain quantitative data on surface roughness, size and depth of defects. We modified such an instrument into a phase-shifting interferometer. Some measurement results are presented and commented.
Cited by 1
R. D. Heidenreich, L. Sturkey · Journal of Applied Physics · 1945
The observation of electron reflections in electron microscope images is reviewed and further data are presented. The observations of the reflected beams with the objective limiting diaphragm removed and the determination of the planes responsible for the reflections by this means are described. The results of the dynamical theory of electron diffraction are briefly discussed and the values of the ``characteristic'' crystal thickness D0 are computed. These values of D0 are compared with the experimental values and are in reasonably good agreement for the MgO (200) reflections at 60, 96, and 103 kv, MgO (220) reflections and CdO (200) reflections at 60 kv. The dynamical theory accounts satisfactorily for the intensity variations except as modified by inelastic scattering and the results may be considered as experimental verification of the theory.
Cited by 37